Wafer Inspection

Machine Vision plays a crucial role in enabling precise inspections and quality controls in the semiconductor industry, encompassing both wafer and microprocessor manufacturing. Leveraging image processing technologies, it identifies minute defects, irregularities, or contaminations on surfaces.

An equally critical aspect involves inspecting engravings and microstructures. Image processing systems are instrumental in verifying the integrity of micro-engravings on semiconductor chips. This is indispensable in the production of microprocessors and other electronic components, where even the slightest deviation can lead to malfunctions.

Accurate measurements are paramount for dimensional inspections to ensure semiconductor parts adhere to specific design requirements. This includes inspecting structural sizes, layer thickness, and other crucial aspects.

Furthermore, the detection of errors in photolithography is essential. Optical systems play a key role in ensuring the correct execution of the photolithography process and identifying any errors in layer exposure that could compromise the functionality of semiconductor components.

The integration of Machine Vision in the semiconductor industry not only contributes to achieving the precision and quality crucial for this sector but also maintains peak productivity.

Selecting lenses for use in the semiconductor industry involves considering several key criteria.

Field of View (FOV)

A wide FoV may be necessary for comprehensive inspections, such as examining a wafer before dicing. Conversely, a narrow FoV is crucial for the detailed capture of micro-engravings during microstructure inspections

Low Distortion

Minimal optical distortions are crucial for obtaining precise images of microstructures, even at the image's edge. This is essential for accurate inspection and quality control.

Spectral Range

Silicon's transparency in the infrared spectrum allows the inspection of deeper product properties through silicon layers. In such cases, infrared-optimized lenses are necessary.

Durability

Given the highly automated nature of semiconductor production, cameras and lenses must be robust and resistant to rapid movements, shocks, and vibrations.

Considering these criteria, optical systems not only enable reliable quality control but also optimize production processes. Tamron’s lens series offer advanced capabilities for high-precision inspections at the highest level.

  • M117FM-RG Series: This series stands out as a reliable choice for wafer and chip inspection, offering a broad field of view, an exceptional resolution of up to 2.4µm pixel pitch and a ruggedized design. Ensuring comprehensive detection of minute defects, irregularities, and contaminations on wafer and chip surfaces, this series excels in delivering precision.
  • MA23FM Series: With its accurate focal length and its robust design, this series is perfectly suited for inspecting engravings and microstructures on semiconductor chips. With an enhanced resolution of up to 8 megapixels, it enables precise monitoring of the precision and integrity of micro-engravings, particularly crucial in the manufacturing of microprocessors and other electronic components.
  • MA111F-VIR Series: With its high resolution of up to 24 megapixels and compatibility with infrared technology, the MA111F-VIR series facilitates precise measurements of structural sizes, layer thicknesses, and other critical dimensions, ensuring semiconductor components adhere to specific design specifications.
  • VIS-SWIR SMA Series: This series covers both the visible and SWIR light range and is uniquely suited for wafer inspection tasks. This comprehensive coverage ensures thorough defect detection, while the precision and spectral versatility of the SMA series enhances quality control and yield optimization in semiconductor manufacturing processes.


As an established manufacturer with an impressive history of experience and continuous innovation, Tamron has proven to be a reliable partner in the optical industry. Our optics experts have extensive machine vision experience and can assist you in selecting the right lens for your application.

M117FM-RG Series
MA23FM Series
MA111F-VIR Series
VIS-SWIR SMA Series